Research on Bulk Silicon Etching for Piezoelectric Miniature Microphone and Capacitive Miniature Microphone 用于压电和电容微麦克风的体硅腐蚀相关研究
The designing principle of the piezoelectric ceramic microphone of the acous-tic oil well logging tool are outlined in the paper. 本文介绍用于石油井深探测仪的压电陶瓷传声器的设计原理。
Piezoelectric acceleration sensor and the electret microphone has been deeply studied, compares their advantages and disadvantages, and selects piezoelectric acceleration sensor as the sensor of the measurement system. 3. 对压电式加速度传感器与驻极体传声器进行了深入的研究,比较了两者的优缺点,确定了选择压电式加速度传感器作为整个测量系统的传感器的正确性。